Comparison of lateral non-uniformity phenomena between HfO2 and SiO2 from magnified C-V curves in inversion region

Journal

ECS Transactions

Journal Volume

25

Journal Issue

6

Pages

327-338

Date Issued

2009

Author(s)

Cheng, J.Y.

Huang, C.T.

Lu, H.T.

Hwu, J.G.

DOI

10.1149/1.3206631

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-76549128163&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/347700

Type

conference paper