Development of metal oxide gas sensor array used in volatile organic compounds detection by nano grinding technology
Date Issued
2016
Date
2016
Author(s)
Liang, Wei-Yuan
Abstract
In this research, a novel gas sensor array that is able to distinguish the individual concentration and fraction of each gas from mixed gas has been developed. The idea is originated from electronic nose. By using nano grinding technology, the particle size of the chosen sensing materials, which is Tungsten trioxide, Titanium dioxide, Zinc oxide, can be effectively reduced to nano scale. There are two main advantages of using nano grinding as manufacturing process. Firstly, the sensor array can be operated room temperature (25oC), no heating process or light activation involved , due to the nano scale particle size and high surface-volume ratio. Secondly, there is no vacuum pumping equipment and annealing process involved during the the manufacturing process, which can reduced huge amount of time and cost. Methanol, Ethanol and Toluene are chosen as the detected gases. Each sensor of the sensor array (WO3, TiO2, ZnO) responds to each detected gas differently. By combining the sensitivities to a matrix, it’s possible to effectively distinguish the individual concentration of Methanol, Ethanol and Toluene from the mixed gas of these three gases. The best detection range of the sensor array is within 500 to 5000ppm. The result of 5% error rate shows that this sensor array is reliable under certain condition.
Subjects
metal oxide
gas sensor
electronic nose
sensor array
Tungsten trioxide
Titanium dioxide
Zinc oxide
nano grinding
Type
thesis
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