The Influences of Multilayered Surface with Nanostructures on Coupled Surface Plasmon: Design and Fabrication of Enhanced Energy Coupling Nanowriter Optical Head
Date Issued
2005
Date
2005
Author(s)
Wu, Tao-Hsuan
DOI
zh-TW
Abstract
This dissertation exploits the extraordinary transmission and directional beaming phenomena of periodic subwavelength hole array on a thin metal film first observed by T.W. Ebbesen and tries to fabricate a metallic optical head with periodic subwavelength structures on both sides to maintain a subwavelength spot size in the far field. Structures on the incident surface exciting surface plasmon on the interface between metal and dielectric enable us to improve energy coupling from incident light and enhance transmission of optical head. Structures on the exit surface recouple the surface plasmon propagated on metal surface back to free space while propagating the exit light beam at a specific angle.
Using RCWA (rigorous roupled wave analysis method), a parameter design flow of optical head has been established. Using FDTD (finite different time domain method), analysis of geometry resonance on the structures has also been proposed. Follow the parameter design flow developed, structure configurations of a metallic optical head with glass substrate were decided for fabrication.
For experimental needs, two E-beam lithography processes were developed to fabricate the double sides structures metallic optical head with an attempt to achieve both enhanced transmission and directionality. Last, observation of actually transmission behavior was obtained to verify the validity and agreement between simulation and experiment.
Subjects
表面電漿子
奈米直寫儀
光學頭
surface plasmon
nano
nanowriter
optical head
Type
thesis
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