Collapse of microchannels during anodic bonding: theory and experiments

Resource

Journal of Applied Physics 95 (5): 2800-2808

Journal

Journal of Applied Physics

Journal Volume

95

Journal Issue

5

Pages

2800-2808

Date Issued

2004

Date

2004

Author(s)

Shih, W.P.

Hui, C.Y.

Tien, N.C.

URI

Type

journal article

File(s)

Name

05.pdf

Size

421.5 KB

Format

Adobe PDF

Checksum

(MD5):f5be5a9d446976ff0b3005c411ae0ce6