On the interaction between measurement strategy and control performance in semiconductor manufacturing

Resource

Journal of Process Control 18 (3-4): 266-276

Journal

Journal of Process Control

Journal Issue

18

Pages

266-276

Date Issued

2008

Date

2008

Author(s)

Su, An-Jhih

Yu, Cheng-Ching

Ogunnaike, Babatunde A.

URI

Type

journal article

File(s)

Name

66.pdf

Size

264.87 KB

Format

Adobe PDF

Checksum

(MD5):315cf23f9c3842a2b8da4260f935e27a