Design and Control of Long Travel Range Electromagnetically Actuated Position System with Application to Precise Machining
Date Issued
2009
Date
2009
Author(s)
Lee, Shan-Tsung
Abstract
This thesis proposes a long travel range electromagnetically actuated position system with application to micro machining. Specially, probe with titanium coating is integrated with electromagnetically actuated and damped positioning stage to perform long range movement of which the latter replaces traditional piezoelectric actuators for the purpose of minimizing the complexity of the electrical system. For most precision motion measurement, laser interferometer is a kind of sensing system which is implemented to improve machining resolution incorporating a king of environment compensation. Furthermore, through both optical sensing and current measurement , we can precisely measure the displacement of the machining probe in vertical direction in order to achieve correct machining depth. n order to enhance system robustness and stability under the reaction force disturbance during machining, a mathematical model of the machining force disturbance is proposed in the first place. After that, a robust adaptive sliding-mode controller is proposed to enhance the system performance for rejecting this disturbance. The controller architecture consists of two components : 1) sliding mode controller, and 2) robust adaptive law. With the proposal controller, our machining stage can achieve high precision machining, where the horizontal positioning error (in root-mean square level) is kept within 52nm.
Subjects
Precision motion control
electromagnetic force actuation
highly precision machining
Type
thesis
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