Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design

Journal

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Pages

108-109

Date Issued

2008

Author(s)

Hsieh, T.-L.

Chang, Y.-T.

Chiou, S.-J.

Tsai, J.-C.

Hah, D.

Wu, M.C.

DOI

URI

Type

conference paper