Recrystallization of C-Al Ion Co-implanted Epitaxial 6H-SiC
Resource
Appl. Phys. Lett.,75,472-474.
Journal
Appl. Phys. Lett
Journal Issue
75
Pages
472-474
Date Issued
1999
Date
1999
Author(s)
Feng, Z. C.
Chua, S. J.
Tone &, K.
Zhao, J. H.
Type
journal article