Sub-60mV/dec Subthreshold Swing on Reliability of Ferroelectric HfZrOx Negative-Capacitacne FETs with DC Sweep and AC Stress Cycles
Journal
2018 International Conference on Solid State Devices and Materials
Date Issued
2018
Author(s)
K.-T. Chen
C.-Y. Liao
R.-C. Hong
S.-S. Gu
Y.-C. Chou
Z.-Y. Wang
S.-Y.Chen
G.-Y. Siang
H.-Y. Chen
C. Lo
P.-G. Chen
Y.-J. Lee
K.-S.Li
S. T. Chang
M. H. Lee
Type
conference proceedings