Imprinting of double-sided microstructures with rapid induction heating and gas-assisted pressuring

Journal

Journal of Micromechanics and Microengineering

Journal Volume

27

Journal Issue

9

Pages

-

Date Issued

2017

Author(s)

Shih, Y.-M.

Kao, C.-C.

Ke, K.-C.

Yang, S.-Y.

DOI

10.1088/1361-6439/aa7acd

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448143

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85028404145&doi=10.1088%2f1361-6439%2faa7acd&partnerID=40&md5=5e9e2cebffdc190a3d6df59167599e07

SDGs

[SDGs]SDG3

[SDGs]SDG9

Type

journal article