Direct patterning on low dielectric constant materials with electron beam lithography

Journal

2001 International Microprocesses and Nanotechnology Conference, MNC 2001

Pages

168-169

Date Issued

2001

Author(s)

Chen, B.-C.

Lai, Y.-K.

Ko, F.-H.

Chou, C.-T.

Chen, H.-L.

DOI

10.1109/IMNC.2001.984143

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491400

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960341259&doi=10.1109%2fIMNC.2001.984143&partnerID=40&md5=5e6e3332027eaf6db2957832f3c3d5f0

Type

conference paper