High performance piezoelectric MEMS generators based on stainless steel substrate
Date Issued
2014
Date
2014
Author(s)
Lin, Shun-Chiu
Abstract
In the past decade, the vibration energy harvesting technologies based on piezoelectric materials have been studied intensively and been improved constantly. The power outputs of piezoelectric MEMS generators are also steadily improved year by year. This dissertation presents the development of piezoelectric MEMS power generators which have the ability to harvest mechanical energy of surrounding vibrations and transform vibration energy into useful electrical power. The harvesting electrical power is able to use in energy storage applications. To improve and get high- efficiency piezoelectric MEMS generators, the lead zirconate titanate (PZT) material was directly deposited on the substrate by the aerosol deposition method which could deposit PZT thin film up to tens micron in minutes. The piezoelectric MEMS generators utilize the d31 and bimorph of PZT for transforming mechanical strain energy into electrical charge by using. For applications with higher vibration levels, the structure with PZT ceramic fabricated on silicon or SOI substrate may break under higher acceleration levels. To increase the mechanical strength of the piezoelectric MEMS generators structure, alternative substrate material, stainless steel substrate is proposed. Finally, we succeed to fabricate the piezoelectric MEMS generators based on stainless steel, piezoelectric MEMS generators based on silicon and piezoelectric MEMS bimorph generators by means of micro-electro-mechanical-systems (MEMS) process. We also compared the output performance of these devices and the lifetime of these devices in a long-term vibration. Experimental results confirm that the devices have the ability to generate power in the hundred micro-watt range and the output voltage is much higher than the minimum requirement for diode band-gaps in the rectifier circuit.
Subjects
微機電
壓電材料
氣膠沉積法
懸臂樑
能量擷取
Type
thesis
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