Structural and Optical Studies on Ion-implanted 6H-SiC Thin Films
Resource
Thin Solid Film,516,5217-5226.
Journal
Thin Solid Film
Journal Issue
516
Pages
5217-5226
Date Issued
2008
Date
2008
Author(s)
Feng, Z. C.
Lien, S. C.
Zhao, J. H.
Lu, X. W. Sun and W.
Type
journal article