Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

Journal

Microelectronic Engineering

Journal Volume

84

Journal Issue

5-8

Pages

750-754

Date Issued

2007

Author(s)

Chen, H.L.

Huang, K.T.

Lin, C.H.

Wang, W.Y.

Fan, W.

DOI

10.1016/j.mee.2007.01.026

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491347

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247645561&doi=10.1016%2fj.mee.2007.01.026&partnerID=40&md5=8e5d7efd21e625fe041cf4090b284f5e

Type

journal article