A novel approach of using a MBE template for ALD growth of high-庥 dielectrics

Journal

Journal of Crystal Growth

Journal Issue

SPEC. ISS.

Pages

378-380

Date Issued

2007

Author(s)

Lee, K.Y.

Lee, W.C.

Huang, M.L.

Chang, C.H.

Lee, Y.J.

Chiu, Y.K.

Wu, T.B.

Kwo, R.

DOI

10.1016/j.jcrysgro.2006.11.262

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443443

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33947327827&doi=10.1016%2fj.jcrysgro.2006.11.262&partnerID=40&md5=2f598ca5e19bc54970e34b0b3e3f3bfe

Type

journal article