Hysteresis reduction by fluorine incorporation into high permittivity tetragonal ZrO2 on Ge

Journal

Applied Physics Letters

Journal Volume

104

Journal Issue

3

Date Issued

2014

Author(s)

Chang, H.-C.

Lin, C.-M.

Huang, C.-H.

DOI

10.1063/1.4862481

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84893368329&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/387384

Type

journal article