Design and Fabrication of Piezoelectric SAW Device for Micro Droplet Control
Date Issued
2006
Date
2006
Author(s)
Lu, Cho-Han
DOI
zh-TW
Abstract
Using surface acoustic wave (SAW) to detect and actuate micro droplet in a two dimensional platform is topic of current research interest. In the method, IDT is utilized to excite SAW and to drive the micro-droplet. By using slanted finger interdigital transducer (SFIT), multi-channel microfluidic becomes possible.
In the present study, we combine the detection and actuation of micro droplets on a single device using SFIT. A LabVIEW program was written and used to automate the maneuvering and mixing of micro droplets on a two dimensional hydrophobic platform. This setup enables us to precisely drive multiple micro droplets onto predetermined location for mixing and through this automation decrease the process time of this complex process.
Based on simulations of the frequency response of SFIT with two droplets onboard, we analyzed the relation between the different aperture design and the sensitivity of the device at determining the distance between the two droplets. In the experiments, the relationship between the actuation frequency and the minimum actuation power were investigated. We also studied the actuation time and actuation waveform that minimizes droplet evaporating. To increase the binding affinity between the OTS molecule and the substrate, creating a high quality hydrophobic film for our device, a 200 nm thick silicon oxide layer was deposited on the substrate.
We note that results of this study can serve as an important reference for developing two dimensional micro droplet controlling device.
Subjects
三氯矽甲烷
接觸角
表面聲波
圖控程式
斜交指叉式換能器
多重道微流晶片
微液珠
OTS
Contact angle
SAW
LabVIEW
SFIT
Multi-channel microfluidic chip
microdroplets
Type
thesis
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