Estimation of dressing effects in chemical mechanical polishing with sorts of diamond dressers

Journal

Advanced Materials Research

Journal Volume

76-78

Pages

175-180

Date Issued

2009

Author(s)

Chen, K.-R.

Young, H.-T.

Chen, K.R.

DOI

10.4028/www.scientific.net/AMR.76-78.175

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447497

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-73949106200&doi=10.4028%2fwww.scientific.net%2fAMR.76-78.175&partnerID=40&md5=81902a1d5748b6a842b74e49f7ff4f2e

Type

conference paper