Virtual metrology modeling based on Gaussian Bayesian network

Journal

Winter Simulation Conference

Journal Volume

2018-December

Pages

3574-3582

Date Issued

2019

Author(s)

Yang, W.-T.

Blue, J.

Roussy, A.

Reis, M.S.

Pinaton, J.

DOI

10.1109/WSC.2018.8632485

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467294

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85062610801&doi=10.1109%2fWSC.2018.8632485&partnerID=40&md5=61fb29dc30a97d352a56cbbdc2edddbc

Type

conference paper