Phase equilibria of the Si-Ge-Ti system relevant to the reactions between SiGe alloys and Ti

Resource

Journal of Electronic Materials,27(7),842-847.

Journal

Journal of Electronic Materials

Journal Volume

27

Journal Issue

7

Pages

842-847

Date Issued

1998-07

Date

1998-07

Author(s)

Kao, T. A. Jain and C. R.

URI

Type

journal article