High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms
Journal
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages
2268-2271
Date Issued
2013
Author(s)
SDGs
Type
conference paper
