Reflective EUVL tool design with generalized Gaussian constant mathematics

Journal

Applied Optics

Journal Volume

57

Journal Issue

20

Pages

5884-5892

Date Issued

2018

Author(s)

Hsiao, L.-J.

DOI

10.1364/AO.57.005884

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/499195

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85050467140&doi=10.1364%2fAO.57.005884&partnerID=40&md5=a0dbe0f3eff75db3c889e31d8485a5b2

Type

journal article