Flexible Complementary Oxide Thin-Film Transistor-Based Inverter with High Gain
Journal
IEEE Transactions on Electron Devices
Journal Volume
68
Journal Issue
3
Pages
1070-1074
Date Issued
2021
Author(s)
Abstract
Wearable bio-sensing devices are considered promising for ubiquitous heath monitoring. To accurately read out small bio-signals, the development of high-performance flexible front-end circuits is crucial. Oxide semiconductors are considered one of the most promising active channel materials for on-polymeric-foil electronics. In this article, a high-gain flexible complementary metal-oxide-semiconductor (CMOS) inverter with a beta ratio of 1, a desirable feature for device miniaturization, was demonstrated by monolithically integrating a top-gated n-type indium gallium zinc oxide (IGZO) thin-film transistor (TFT) and a bottom-gated p-type SnO TFT on a 5.5-μm-thick polyimide substrate. The influence of atomic layer deposited (ALD)-HfO2 capping layer on the properties of oxide active channels has been analyzed. The flexible inverter exhibited a high static voltage gain of 370 V/V and balanced noise margins (noise margin high of 4.8 V, noise margin low of 4.7 V) for a supply voltage of 10 V. In addition, the voltage transfer characteristics remained virtually unchanged when the device was subjected to an outward or an inward bending radius of 2.5 mm, indicating the complementary oxide-TFT-based inverter is practical for flexible electronics applications. ? 1963-2012 IEEE.
Subjects
Atomic layer deposition; CMOS integrated circuits; Electric inverters; Field effect transistors; Flexible electronics; Gallium compounds; II-VI semiconductors; Metals; MOS devices; Oxide semiconductors; Semiconducting indium; Semiconducting indium compounds; Substrates; Thin film transistors; Thin films; Zinc oxide; Atomic layer deposited; Complementary metal oxide semiconductors; Desirable features; Electronics applications; Front-end circuits; Indium gallium zinc oxides; Oxide thin-film transistors; Polyimide substrate; Thin film circuits
Type
journal article