Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images

Journal
24th International Microprocesses and Nanotechnology Conference (MNC 2011)
Date Issued
2011
Author(s)
Yen-Min Lee
Fu-Min Wang
Hsin-Hung Cheng
Yu-Tian Shen
Kuen-Yu Tsai
Alek C. Chen
URI
Type
poster

臺大位居世界頂尖大學之列，為永久珍藏及向國際展現本校豐碩的研究成果及學術能量，圖書館整合機構典藏（NTUR）與學術庫（AH）不同功能平台，成為臺大學術典藏NTU scholars。期能整合研究能量、促進交流合作、保存學術產出、推廣研究成果。

To permanently archive and promote researcher profiles and scholarly works, Library integrates the services of “NTU Repository” with “Academic Hub” to form NTU Scholars.

總館學科館員 (Main Library)
醫學圖書館學科館員 (Medical Library)
社會科學院辜振甫紀念圖書館學科館員 (Social Sciences Library)

開放取用是從使用者角度提升資訊取用性的社會運動，應用在學術研究上是透過將研究著作公開供使用者自由取閱，以促進學術傳播及因應期刊訂購費用逐年攀升。同時可加速研究發展、提升研究影響力，NTU Scholars即為本校的開放取用典藏（OA Archive）平台。（點選深入了解OA）

  • 請確認所上傳的全文是原創的內容，若該文件包含部分內容的版權非匯入者所有，或由第三方贊助與合作完成，請確認該版權所有者及第三方同意提供此授權。
    Please represent that the submission is your original work, and that you have the right to grant the rights to upload.
  • 若欲上傳已出版的全文電子檔，可使用Open policy finder網站查詢，以確認出版單位之版權政策。
    Please use Open policy finder to find a summary of permissions that are normally given as part of each publisher's copyright transfer agreement.

Built with DSpace-CRIS software - Extension maintained and optimized by 4Science