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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
A cost-effective methodology for a run-by-run EWMA controller
Details
A cost-effective methodology for a run-by-run EWMA controller
Resource
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Journal
1997 IEEE International Symposium on Semiconductor Manufacturing Conference
Pages
61-64
Date Issued
1997-10
Date
1997-10
Author(s)
Guo, Ruey-Shan
Huang, Li-Shia
Chen, Argon
Chen, Jin-Jung
DOI
10.1109/ISSM.1997.664623
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/334391
http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910031873/1/00664624.pdf
Type
conference paper
File(s)
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Name
00664624.pdf
Size
356.31 KB
Format
Adobe PDF
Checksum
(MD5):f1d60a11a6b82b812ebce41e3437ce36
