Portable measurement system for static and dynamic characterization of MEMS component

Journal

Lecture Notes in Electrical Engineering

Journal Volume

234 LNEE

Pages

931-939

Date Issued

2013

Author(s)

Wu, H.-W.

Chen, L.-C.

Tapilouw, A.M.

Nguyen, X.-L.

Chen, J.-L.

LIANG-CHIA CHEN

DOI

10.1007/978-1-4614-6747-2_108

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447846

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84881054415&doi=10.1007%2f978-1-4614-6747-2_108&partnerID=40&md5=04e268107861d91cc5f03b647e83b234

Type

conference paper