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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Novel guiding template and mask assignment for DSA-MP hybrid lithography using multiple BCP materials
Details
Novel guiding template and mask assignment for DSA-MP hybrid lithography using multiple BCP materials
Journal
56th ACM/IEEE Design Automation Conference (DAC-2019)
Journal Volume
148580
Pages
8460157
Date Issued
2019
Author(s)
Yi-Ting Lin
Iris Hui-Ru Jiang
HUI-RU JIANG
江蕙如
DOI
10.1145/3316781.3317871
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/427639
Type
conference paper
