Structural and Optical Studies on Ion-implanted 6H–SiC Thin Films

Resource

Thin Solid Films 516 (16): 5217-5222

Journal

Thin Solid Films

Journal Volume

516

Journal Issue

16

Pages

5217-5222

Date Issued

2008

Date

2008

Author(s)

Feng, Z.C.

Lien, S.C.

Zhao, J.H.

Sun, X.W.

Lu, W.

URI

Type

journal article

File(s)

Name

31.pdf

Size

728.32 KB

Format

Adobe PDF

Checksum

(MD5):49e9c20d377090edcb9a119f0ecd1ddd