Thermal Diffusivity in Amorphous Silicon Carbon Nitride Thin Films by the Traveling Wave Technique

Journal

Applied Physics Letters

Journal Volume

79

Journal Issue

3

Pages

332-334

Date Issued

2001

Author(s)

S. Chattopadhyay

C. T. Wu

K. H. Chen

J. S. Wu

Y. F. Chen

G. Lehmann

P. Hess

DOI

URI

Publisher

American Institute of Physics

Type

journal article