Position Error Compensation of a Precision Microstage
Resource
Proc. of the 5th Int. Conf. on Automation Technology, Taipei, Taiwan, ROC.(1998.07)
Journal
Proc. of the 5th Int. Conf. on Automation Technology, Taipei, Taiwan, ROC.(1998.07)
Pages
-
Date Issued
1998-07
Date
1998-07
Author(s)
K.C. Fan
Type
conference paper