Electromechanical behavior of the curled cantilever beam
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Journal Volume
8
Journal Issue
3
Date Issued
2009
Author(s)
Lin, Quei Yen
Chuang, Wan-Chun
Tsai, Yi-Lin
Hu, Yuh-Chung
Lee, Chi-Yuan
Liu, Ming-Che
Lin, Wei-Cheng
Hsueh, Po-Ren
Liaw, Shwu-Jen
SDGs
Type
journal article