Silicon nanowires synthesized by vapor-liquid-solid growth on excimer laser annealed thin gold film
Journal
Journal of Nanoparticle Research
Journal Volume
9
Journal Issue
4
Pages
657-660
Date Issued
2007
Author(s)
Abstract
The fabrication of Si nanowires has been demonstrated using excimer laser annealed thin gold film as the catalyst and vapor-liquid-solid (VLS) growth. Au nanoparticles with mean diameters of 12, 13 and 15 nm were formed by excimer laser annealing (ELA) of Au film with thickness of 2.5, 5 and 10 nm, respectively. The results show that the silicon nanowires (SiNWs) with desired diameter can be obtained by controlling the Au film thickness and laser power density. © 2006 Springer.
Subjects
Excimer laser annealing; Gold film; Nanoparticle; Silicon nanowire
Other Subjects
Annealing; Excimer lasers; Film growth; Nanowires; Silicon; Synthesis (chemical); Thin films; Excimer laser annealing (ELA); Silicon nanowires; Thin gold films; Gold; gold; nanowire; silicon; article; catalyst; excimer laser; film; liquid; particle size; priority journal; solid state; synthesis; thickness; vapor
Type
journal article
