Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure

Resource

Microelectronic Engineering 83 (4-9): 893-896

Journal

Microelectronic Engineering

Journal Issue

83

Pages

893-896

Date Issued

2006

Date

2006

Author(s)

Chen, H.L.

Chuang, S.Y.

Cheng, H.C.

Lin, C.H.

Chu, T.C.

URI

Type

journal article

File(s)

Name

24.pdf

Size

191.43 KB

Format

Adobe PDF

Checksum

(MD5):8c1d86c62420d6e243b073d5726ceb65