Integrated High Speed Precision Positioning System and Designing for the Controlled Strategy of Dual Stage Actuator
Date Issued
2004
Date
2004
Author(s)
Wang-Han-Fu
DOI
zh-TW
Abstract
The ultra precision positioning technique has become one of the important parts in the development of the precision machines. Our lab has many experiences on developing metrology’s system； but to the positioning tech, the subsystem will extend for the positioning system. The thesis will be discussed under the high-frequency, high dynamic range and high-accuracy application demand, whole resultant examines and designs the basic problems faced systematically. This text will introduce the characteristics, such as bandwidth, dynamic range and precision issues, etc. From every subsystem of the introductions, like the metrology, signal process and controls system, it examined the match problems with the interface among the each subsystem, find in the discussions, it may become the basic bottleneck to orient the platform, and then it is the feasibility of the structure to put forward dual stage actuators.
The combination of a macro-stage and a short reach mini-stage enables fast, precise stage through an orient task. The most straight forward method of designing the control system is to develop independent controllers for the macro and mini subsystem and from a control architecture, where the reference input for the mini is the difference between the desired tip position and the macro position, by the mini-stage actuating fast and high accuracy, it compensates all possible error sources in the position tasks. But analyze this device further, the mini rides on the macro, there will be coupling from the mini control force to the macro. This one way dynamic coupling leads to interactions that degrade performance.
For the effectors, control strategy will adding a vibration controller into the architecture, and discussing what kinds of problems will be occurred, finally simulation works will offer information on implement and preparations for the future works.
Subjects
雙致動器
振動控制
繞射式干涉儀
vibration control
dual stage actuator
hight speed positioning
Type
thesis
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