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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A fundamental modeling approach for nano-grinding of silicon wafers
Details
A fundamental modeling approach for nano-grinding of silicon wafers
Journal
Progress on Advanced Manufacture for Micro/Nano Technology 2005, Pt 1 and 2
Pages
253-258
ISBN
978-0-87849-990-8
Date Issued
2006
Author(s)
Young, H. T.
Huang, H. Y.
Yang, Y. J.
HONG-TSU YOUNG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/447501
Type
book chapter