Reconstruction at the interface of one cycle of trimethylaluminum and water on GaAs(111)A-2?2 from atomic layer deposition

Journal

Applied Physics Express

Journal Volume

8

Journal Issue

12

Date Issued

2015

Author(s)

Fanchiang, Y.-T.

Chiang, T.-H.

Pi, T.-W.

Wertheim, G.K.

Kwo, J.R.

DOI

10.7567/APEX.8.126602

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443324

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84948733608&doi=10.7567%2fAPEX.8.126602&partnerID=40&md5=d5e6b4105f6b8ba8250b1ed8557fa0af

Type

journal article