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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
Real-time equipment health evaluation and dynamic preventive maintenance
Details
Real-time equipment health evaluation and dynamic preventive maintenance
Journal
IEEE International Symposium on Semiconductor Manufacturing Conference
Journal Issue
1
Pages
375-378
Date Issued
2000
Author(s)
Chen, A.
Guo, R.-S.
Wu, G.-S.
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034583773&partnerID=40&md5=c6e4e51ee3b1c8a3e8ffdd0101f56fc5
https://scholars.lib.ntu.edu.tw/handle/123456789/407844
Type
conference paper