SMM actuator for nano-scale positioning

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

5602

Pages

218-225

Date Issued

2004

Author(s)

Hu, E.T.

Huang, K.Y.

Hwang, I.S.

KUANG-YUH HUANG

DOI

10.1117/12.570786

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447763

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-17644426672&doi=10.1117%2f12.570786&partnerID=40&md5=47e4f2a4136a06ab47809d0ef6fd351e

Type

conference paper