製程非均勻度的多重變異分解與合理分群之研究
Other Title
Multiple Variation Decomposition and Rational Sub-grouping
on Modeling Process Non-uniformity
on Modeling Process Non-uniformity
Date Issued
2002
Date
2002
Author(s)
DOI
902416H002030
Abstract
In this research, we focus on the process
non-uniformity and its variation causes. We apply
the concept of rational sub-grouping to the
systematic search for the special causes and
propose methods for non-uniformity reduction.
The advantages of rational sub-grouping are
twofold: (1) higher sensitivity for special causes
(2) effective classification of variation sources.
We used the oxidation layer’s non-uniformity of a
rapid thermal process (RTP) as an example. By
using the rational sub-grouping method, we
develop three non-uniformity statistics: NU1, NU2,
and NU3, to represent different variation sources.
Among the three statistics, NU1 represents the
overall non-uniformity and is a statistic usually
adopted in practice. We also propose two novel
statistics. NU2 represents the surface roughness
while NU3 is an indication of the surface
unevenness. We find the relationship among the
three statistics to be:
2
3
2
2
2
1 NU NU NU + » In
addition, the statistical properties of the three
statistics are analytically investigated and their properties are further verified using simulations.
Results provide in-depth information for process
improvement strategies.
Subjects
non-uniformity
rational subgrouping
variation decomposition
Publisher
臺北市：國立臺灣大學工商管理學系
Type
report
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