Facile preparation of hazy Ga-doped ZnO electrodes by atmospheric pressure plasma jet
Journal
Applied Surface Science
Journal Volume
580
Date Issued
2022
Author(s)
Abstract
Increasing the optical path length without degrading optoelectronic properties of front electrodes of solar cells is promising to enhance the power conversion efficiency. This can be achieved by increasing the haze (H) of the electrode through texturing, while retaining high transmittance (Tt) and low sheet resistance (Rs). However, it is challenging to balance these properties simultaneously since they are mutually influenced. Here, we present a facile, low-cost, and single-run method of preparing gallium-doped zinc oxide (GZO) with high H (>25%), high Tt (>90% in the visible range, referenced to glass), and low Rs (6.62 Ω sq?1) using atmospheric pressure plasma jet. First, we increase the nozzle-substrate distance, or working distance (WD), to deposit a thin, rough GZO as a haze enhance (HE) layer and immediately deposit a standard GZO layer using the same apparatus. By tailoring the roughness of the HE layer using WD and scanning pitch, we successfully produce high-quality hazy GZO that have competitive figures of merit of 6.3 × 10?2 Ω?1 (referenced to the glass) and 2.1 × 10?2 Ω?1 (overall), and H = 25%. Also, unlike conventional methods, our approach does not require vacuum, etching, additional materials, or change of machine/tooling, which can significantly reduce the operational complexity. ? 2021 Elsevier B.V.
Subjects
atmosphere pressure plasma jet (APPJ)
Gallium-doped zinc oxide (GZO)
Hazy electrodes
Light scattering
Photovoltaics
Atmospheric pressure
Deposits
Electrodes
Etching
Gallium compounds
Glass
II-VI semiconductors
Plasma jets
Solar cells
Vacuum applications
Zinc oxide
Atmosphere pressure
Atmosphere pressure plasma jet
Atmospheric pressure plasma jets
Facile preparation
Gallium doped zinc oxides
Gallium-doped zinc oxide
Hazy electrode
High transmittance
Working distances
SDGs
Type
journal article