Doping and electrical properties of amorphous silicon carbon nitride films

Journal

Diamond and Related Materials

Journal Volume

12

Journal Issue

3-7

Pages

1213-1219

Date Issued

2003

Author(s)

DOI

10.1016/S0925-9635(02)00393-X

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0038522568&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/301388

Type

journal article