Dynamic nano-scale surface profilometry using stroboscopic interferometry

Journal

IECON Proceedings (Industrial Electronics Conference)

Pages

3027-3032

Date Issued

2007

Author(s)

Chen, L.-C.

Lai, H.-W.

Huang, Y.-T.

Chang, J.-C.

Chang, C.C.

Chen, J.-L.

LIANG-CHIA CHEN

DOI

10.1109/IECON.2007.4460184

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447884

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-49949108454&doi=10.1109%2fIECON.2007.4460184&partnerID=40&md5=bf245b0b9d8e5998a6475ce655f15508

Type

conference paper