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College of Electrical Engineering and Computer Science / 電機資訊學院
Electronics Engineering / 電子工程學研究所
Stitch-aware routing for multiple e-beam lithography
Details
Stitch-aware routing for multiple e-beam lithography
Journal
Design Automation Conference
Date Issued
2013
Author(s)
Fang, S.-Y.
Liu, I.-J.
YAO-WEN CHANG
DOI
10.1145/2463209.2488765
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84879860403&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/380149
Type
conference paper
