Application of 3C Duct Design Method in Semiconductor Factory Process Exhaust Systems

Resource

ASHRAE Transactions 108: 210-220

Journal

ASHRAE Transactions

Pages

210-220

Date Issued

2002

Date

2002

Author(s)

Chen, Wen-Liang

Chen, Huei-Jiunn

Ting, Chun-Chih

URI

Type

journal article