可形變高分子薄膜材料之光學特性研究
Date Issued
2005-10-31
Date
2005-10-31
Author(s)
DOI
932218E002135
Abstract
In order to overcome difficulties mentioned above and explore the new territory of optical
MEMS, a new class of MEMS devices has begun to surface -- components made with highly
compliant polymeric materials as a principal design element. This platform differs from
conventional MEMS by adding a set of softer, more compliant, polymeric materials to the list of
conventional rigid silicon-based materials used in traditional MEMS. In this project, we explore
the possibility of using amorphous fluoroplymer, also known as CYTOP®. The compliant
materials used in this new class of MEMS devices are as much as three orders of magnitude less
stiff and can easily be tailored over a range of three orders of magnitude. Additionally, they can
be deposited in a much broader range of layer thicknesses. This very wide range of flexibility
expands the design space for MEMS devices far beyond what is possible with traditional
silicon-based materials. There are several other advantages that compliant polymers enjoys over
silicon-based MEMS, including mechanical deflection requires much lower energy, mechanical
damping can be included to avoid high frequency noise, fewer discrete components provide better
reliability at lower cost, and compact package design permits superior integration.
Through this project, we have systematic studies and fundamental understandings on how
compliant polymers can be improved and be optimized. In this project, we explored this
not-yet-well-known field and conduct both simulation and experiments on how the polymer
material can be used to make deformable surface and its compatibilities with existing MEMS
technology. The project will focus on the optical properties of polymer material fabricated by
MEMS technology in the following areas, surface roughness and its relation to polymer
structures/fabrication process and environmental resistance of various polymers.
2
To conclude, this is the initial efforts to study the material properties of amorphous
fluorcarbinate polymer for the application in Optical MEMS. The results will provide deep
understandings of compliant polymer materials and form the foundation of future development
for micro optics.
Subjects
Optical Micro-Electro-Mechanical Systems
Polymer
Surface Roughness
Large Deformation
Reliability
Publisher
臺北市：國立臺灣大學光電工程學研究所
Type
report
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