Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
Date Issued
2006
Date
2006
Author(s)
Huang, Pei-Chen
DOI
zh-TW
Abstract
Because of the applications in UV-Blue light emitting devices, gallium nitride materials have drawn much attention. In order to reach more advanced processes, a simple and effective method to fabricate sub-micro triangular structures on GaN is needed. This thesis introduces microsphere lithography (MSL) and photoelectrochemical (PEC) etching, and describes how to fabricate sub-micro triangular rods by these methods. Crystallographic etching properties are inspected and compared with triangular rod’s facets. In addition, the rods are analyzed with optically pumped experiment apparatus and the results are discussed in this theis.
Subjects
氮化鎵
小球顯影術
光致化學蝕刻
GaN
Nanosphere Lithography
photoelectrochemical etching
Type
thesis
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