Micorlens fabrication process and simulation analysis in contact image sensor
Date Issued
2008
Date
2008
Author(s)
Hsieh, Jo-Lan
Abstract
Scanning device is widely used in many function peripherals such as printer machine, facsimile machine and finger printer. With more requiring in market, replication accuracy is important in fabrication processing.he GRIN lens array can form erect image with unit magnification, and need short length of light path. Therefore it can be applied in contact image sensor device. But the GRIN lenses are produced by silver ion exchange in a special glass and composition of the glass is protected by a patent. his paper attempted to find out the alternative lens in CIS mould and then to analyze its image properties by simulation tools. In this study, standard photolithography was conducted for fabrication of microlens and coating an adequate refractive index material on it to achieve long focal length. Using double slits on the proper position had the same function of black resin in SLA.rom the present results of simulation analysis, the image quality was affected by the surface type (i.e. conic constant k). Finally, we suggested that perfect parabolic surface type was suitable for high MTF, large DOF and small aberration. The accuracy of controlling surface profile is very important and may be carried out by the effect of hydrophobic and hydrophilic.
Subjects
contact image sensor
microlens array
Type
thesis
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