Fabrication and Analysis of Photonic Crystal Microcavities Embedded with Quantum Dots
Date Issued
2008
Date
2008
Author(s)
Ou, Yen-Chih
Abstract
In this work, we used plane wave expansion and finite-difference time-domain methods to simulate the resonant behavior of photonic crystal cavities. Using InGaAs quantum dots as active material, we have successfully fabricated two dimension photonic crystal slab microcavities by E-beam lithography, dry etching and wet etching techniques. First, we observed that resonant mode numbers and quality factor of whispering gallery modes increase with the cavity sizes. Resonant modes can be controlled by different designs of lattice constants and air hole radii respectively. Second, we have simulated and fabricated photonic crystal cavities with improved quality factors by rearranging the inner holes to form a more circular cavity. We added an air hole with 50nm diameter in center to suppress the side modes. In linear cavities study, we observed that quality factors of resonant mode change when rearranging air holes at both edges. Third, we observed resonant modes at various temperatures, which show red-shift behavior and intensity variation with increasing temperature.
Subjects
photonic crystal
cavity
Type
thesis
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