Ultra-Small Ultra-Violet GAN based Micro Light Emitting Diodes with High Efficiencies
Journal
2025 IEEE Photonics Conference, IPC 2025 - Proceedings
Start Page
1
End Page
2
Date Issued
2025-12-22
Author(s)
Abstract
We fabricated InGaN-based UV micro-LEDs with sizes from 3-micron to 100-micron and tested for their photonic properties. A TMAH treatment enhanced the device efficiency and reduce the reverse bias leakage current for 3-micron devices.
Event(s)
2025 IEEE Photonics Conference, IPC 2025
Subjects
external quantum efficiency
micro-LEDs
sidewall passivation
TMAH
Publisher
IEEE
Type
conference paper