Development of a Mini-Environment Chamber with High Precision Active Vibration Isolation and Constant Temperature Control
Date Issued
2008
Date
2008
Author(s)
Liu, Yi-Cheng
Abstract
With the progress of Hi-Tech industry, the products have already reached the level of micro/nano-meter. During the processing or measuring course of micro/nanotechnology, we must consider the environmental effect that have a fundamental influence on the temperature and vibration control. The aim of this thesis is to develop a mini-environment chamber with high precision active vibration isolation and constant temperature control.he environment chamber is designed as the separation type that can separate the operational vibration from the cooling chamber. The temperature of the chamber is controlled by the thermoelectric cooling units. The temperature control method employs the PI control. This design can not only reduce the vibration from the cooling elements but also obtain the good constant temperature control of chamber. he active vibration isolation system consists of the active vibration isolation unit, spring and platform. The main components of the active vibration isolation unit are the self-developed optical accelerometer, and VCM actuator. In this system, the commercial DVD pickup head is used as the sensor which combines the special designed seismic structure to form an optical accelerometer. The voice coil motor (VCM) is taken from the loudspeaker as the actuator that paralleled with the spring to form an anti-vibration actuator. The optical accelerometer and anti-vibration actuator are integrated into an active vibration isolation unit. Moreover, the vibration control algorithm employs the optimal independent modal space control (Optimal IMSC) to obtain optimal feedback force command. The mini environment chamber with the high precision active vibration isolation and constant temperature control is developed in this work. This innovation not only reduces the cost but also benefits further researches in the field of micr/nano-meter.
Subjects
separation type mini-environment chamber
thermoelectric cooling chip
active vibration isolation system
DVD pickup head
voice coil motor (VCM)
optimal independent modal space control
Type
thesis
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